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MM-Series Side Mount |
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Patented SCI MM-Series Side Mount Rotary Cathode |
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· Fits most chamber designs · High power with no inductive heating, no brush dust · High packing density, dual cathodes in 350mm space · Drive motors mount up, down, sideways, in or out · Short maintenance time · Allows co-sputtering, tighter plasma coupling, limits shield coating · Keeps your coater dry reducing pump time and stabilizing process · Easy, in-house maintenance
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Benefits |
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· Customized drive shaft length · Patented power delivery technology · Compact form factor · Flexible form factor · Easy access seal cartridges · Magnet bar externally adjustable to any angle · Advanced water drain feature · Simple design, fewer parts
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Features |
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Revolutionary Design |
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Sputtering Components, Inc. |
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Contact Us: |
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Sputtering Components side mount cathodes can be installed on new or existing coating systems.
SIDE MOUNT BENEFITS ü All utilities external ü Utilities remain attached during target changeover ü Wider glass coverage than traditional end blocks
NEW SYSTEM INSTALLATIONS ü SCI’s compact design allows chamber design flexibility and the ability to install more cathodes in your system. ü Integrate with TRiM-Bar™ Magnet Bars and e-Cathode™ electronics package
RETROFIT ü Compact and flexible design to fit almost every chamber style ü Coater modification and integration support ü Switch between planars and side-mounts in the same slot
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The MM-Series side mount rotary cathode uses the same patented technology as our MC-Series end block for outstanding value, performance, and reliability in an ultra-compact package. |
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Model |
Power |
V/A |
Target (mm) |
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MM |
Up to 100kW DC or 80 kHz MFAC |
1000v/225A |
Up to 2000 |