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TRiM-Bar Plus Magnetics

The SCI TRiM-Bar provides the flexibility you need.  Provided with encapsulated magnets, magnet assemblies are adaptable to fit your process requirements.

· Carefully matched, high-strength encapsulated magnets

· Narrow deposition profile, minimizes buildup of coating on side walls

· Long-life multi-roller system for sputter up, sputter down, or off-angle

· Easy uniformity adjustment

The Sputtering Components TRiM-Bar

 

NEW SYSTEM INSTALLATIONS

ü Most versatile rotary magnet system available

 

 

UPGRADE OLD MAGNET BARS

ü Interchangeable with other major manufacturers

ü Can adapt to any end block system

 

 

CHOOSE YOUR PERFORMANCE LEVEL

ü Optimize uniformity

ü Optimize material utilization

ü Optimize both material utilization and uniformity on the same bar

 

 

SCI TRiM-Bar Magnet Bar

Features

· Uniformity +/- 2%; superior uniformity and target utilization

· Higher deposition rates, less debris

· Ability to run thicker targets; lengthen campaign increase uptime

· Long life, no maintenance

· Sputter up or down

Benefits

Revolutionary Design

Sputtering Components, Inc.

中文 

 

Model

 

Utilization

 

Uniformity

 

Target O.D.

Standard Utilization

 

Up to 70% or more

 

+/- 2%

 Up to 165mm outer diameter

High

Utilization

 

Up to 90% or more

 

+/- 2%

 Up to 165mm outer diameter