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e-Cathode™

The SCI e-Cathode™ is a turnkey solution for original equipment manufacturers and those upgrading systems.

· Integrated PLC

· 6” LCD Touch Panel Input

· Universal digital interface

· User selectable data interface; Ethernet, profibus, DH+, more...

· Fully interlocked

· Optional quick-disconnect High Voltage connection

· Customized end block mounts

The SCI e-Cathode™ adapts to any coating system.

 

NEW SYSTEM INSTALLATIONS

ü Available in single, dual, or quad end block configurations

ü Available for side mount cathodes

ü User provides system outline

ü SCI solution fits to your system

ü Turn-key solution

 

UPGRADE EXISTING LIDS

ü Add SCI end blocks and e-Cathode™ electronics to you lid

ü Use existing utilities

ü No changes necessary to power, gas, or anodes

 

CONVERT TO DUAL ROTARIES

ü Replace your existing planars

ü Compact design fits narrow slots

ü Gain throughput in your existing chamber

ü Improve quality and material utilization

 

 

SCI e-Cathode™

· Self contained and programmable

· Monitor and control cathode parameters locally at the lid

· Access from any brand of PLC

· Adapts to your current data bus

· Fail-safe configuration

· Fast installation and removal

· Fits any chamber depth, no need to change target to substrate distance

 

Benefits

Features

Revolutionary Design

Sputtering Components, Inc.

Download data sheet (.pdf)

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