MM-Series External-Mount End Block

MM-Series External Mount End Block

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The MM is our mid-size external-mount end block. It can handle targets up to 2500 mm (supported) and has a power rating of up to 100 kW DC or 80 kHz MFAC. 

The MM-Series external-mount end block uses the same patented technology as our MC-Series end block to deliver outstanding value, performance, and reliability in a compact design

MM-Series External Mount End Block

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Features
  • Customizable drive shaft length
  • Compact and flexible design
  • Easy access water seal cartridge
  • Patented power-delivery technology
  • Patented target water fill and drain
  • Simple design for fewer parts
  • Magnet bar externally adjusts to any angle
Benefits
  • Wider substrate coverage than  internal end blocks
  • Fits most chamber designs
  • All utilities are external and remain attached during target changeover
  • High-packing density; dual cathodes in 350 mm space
  • Drive motors can be mounted mount up or down and inward, or outward
  • High-power with no inductive heating impact - no brush dust
  • Fast, simple, in-house maintenance
  • Allows co-sputtering, tighter plasma coupling, and limits shield coating

MM-Series External Mount End Block

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Power

Up to 100 kW DC or 80 kHz MFAC

V/A

1500 V / 225 A

Max. Target Length

Up to 2500 mm (supported)

Cantilever capability depends upon target tube length and weight. 

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