e-Cathode™ OEM Lid Sputtering Components

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Product Overview
Features/Benefits
Specifications

e-Cathode™ OEM Lid

The SCI e-Cathode™ OEM Lid can be purchased as a complete lid system (digital or analog) or scaled-back according to your requirements.

SCI provides OEM equipment builders complete turn-key solutions, ready to interface with their systems. We can provide as much controls integration as desired onboard the e-Cathode^TM.

e-Cathode™ OEM Lid

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Features	Digital and Analog: Local and remote control Optional MFC, gas bar, and anode integration Full safety interlocks Customized discrete I/O connector High voltage, quick disconnect included User defined target-to-substrate distance Digital Only: Integrated PLC and touch panel Real-time monitoring Advanced parameter monitoring Communicates via Ethernet, profibus, DH+ and more Analog Only: Analog control interface Basic parameter monitoring
Benefits	Speeds system design and integration Reduce cabling requirements

Features

Digital and Analog: