Square-tube Gas Manifold (SGMA)

Square-tube Gas Manifold (SGMA)

The square tube gas manifold is an adjustable solution for non-uniform systems.

Flow uniformity is verified by finite element analysis.

It has a robust, simple design and is easily cleaned.

Square-tube Gas Manifold (SGMA)

  • Outlets are replaceable and adjustable
  • Segmented for main gas and additional gases
  • Complete with mounting hardware and waste shielding
  • Robust, simple design
  • Adjustable uniformity for non-uniform systems
  • Durable and easy to clean
  • Compatible with high temperature processes

Square-tube Gas Manifold (SGMA)

Maximum length

4000 mm

Gas uniformity


Outlet type

Replaceable, adjustable

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