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Magnet Bars for 80 mm Inside Diameter Targets

Available in two basic models, magnet bars for 80 mm inside diameter targets have the following advantages:

  • Designed using 3D finite element analysis software - for meeting your application requirements
  • Carefully matched, high-strength magnets that are factory calibrated using an automated magnet bar measurement tool - for uniform coatings
  • Fully encapsulated magnets and robust construction - for many years of trouble-free operation
  • Long-life, multi-roller system - for reliable sputter up, sputter down or off-angle sputtering
  • Magnetic positioning points that are easily set using simple tools - for easy uniformity adjustment
  • A simple installation procedure with solutions for vertical installation and connecting to end blocks from other manufacturers
Specifications
Maximum Target Outside Diameter

TRM80-Bar™: 115 mm

SRM80-Bar™: 115 mm

Gauss (typical)

TRM80-Bar™: To be determined

SRM80-Bar™: 565

Sputter Angle

TRM80-Bar™: +/- 19°

SRM80-Bar™: +/- 28°