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Binary Gas Manifold (BGMA)

The Binary Gas Manifold (BGMA) has equal conductance at each outlet for the most even gas flow and the fastest reactive sputtering response time, regardless of manifold length.

  • Segmented for main gas and additional process gases
  • Flow uniformity verified with finite element analysis
  • Robust, simple design that is easily cleaned
  • Shielding and mounting hardware are included
Maximum Length

4000 mm

Outlet Type

Non-replaceable, non-adjustable


Highest uniformity, (<+/- 1.2%)

Fast reactive sputtering response time