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e-Cathode™ Process Lids and Doors

Sputtering Components e-Cathode™ process lids (compartments) and doors for single (dc) or dual (ac) rotary magnetrons are a turnkey solution for new or existing coaters.

OEM lids for new coaters

Available in both digital and analog formats, vertical or horizontal orientation and customized to end user needs. OEM lids and doors can be purchased as a complete system or scaled-back according to your requirements.

Lid clones

For users needing to add cathodes to their existing coater, our process lid clones match all your current external mechanical and electrical interfaces but use SCI end blocks, magnet bars and control systems. We can also modify your existing lid designs to meet your changing needs.

Lid retrofits

Improve coater uptime and lower maintenance costs by replacing unreliable cathodes in a lid retrofit

Outboard Logic

Digital: PLC

Analog: Relay




Digital: Local (touch screen); Remote (Ethernet, Profibus, DH+)

Analog: Local (light, switches); Remote (discrete, I/0)


Digital: Real time and advanced parameter

Analog: Basic parameter

Water Flow

Digital: Flow rate indicator

Analog: Flow switch

Water Temperature

Optional with digital models

Onboard MFC

Optional with digital models

Differential Pumping


Gas Manifolds