Sputtering Components e-Cathode™ process lids (compartments) and doors for single (dc) or dual (ac) rotary magnetrons are a turnkey solution for new or existing coaters.
OEM lids for new coaters
Available in both digital and analog formats, vertical or horizontal orientation and customized to end user needs. OEM lids and doors can be purchased as a complete system or scaled-back according to your requirements.
For users needing to add cathodes to their existing coater, our process lid clones match all your current external mechanical and electrical interfaces but use SCI end blocks, magnet bars and control systems. We can also modify your existing lid designs to meet your changing needs.
Improve coater uptime and lower maintenance costs by replacing unreliable cathodes in a lid retrofit.