SCI stocks wear and spare parts for fast delivery. We also manufacture any other part as needed.
- Worldwide replacement-part-management network with fast shipment
- Guaranteed original parts manufactured by Sputtering Components for the best availability and reliability.
For ordering, please contact your regional sales representative.
If possible, please have the six-digit part number, which can be found in the user manual.
Recommended spares for basic cathodes
- Target O-ring
- Target clamp screw
- Complete seal kit (includes rotary vacuum seal kit, rotary water seal kit, static seal kit and greases)
- End shield bushing