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Square-Tube Gas Manifold (SGMA)

The square tube gas manifold is an adjustable solution for non-uniform systems.

  • Segmented for main gas and additional process gases
  • Flow uniformity verified with finite element analysis
  • Robust, simple design that is easily cleaned
  • Shielding and mounting hardware included
Maximum Length

4000 mm

Outlet Type

Replaceable, adjustable


Adjustable uniformity for non-uniform systems