For mounting inside a vacuum chamber, the new MC Swing Cathode™ accommodates larger substrates and can replace planar cathodes without modifying the chamber.
The magnet pack swings in a programmable rotary axis that is independent of the rotating target tube, making it an ideal system for display or 3D part coating.
Uniformity of < ±1% can be achieved on a static substrate (compared to > ± 15% on static substrates when not using swing).
Other uses for Swing Cathodes™ are to pivot the magnet bar to a burn in location or to make magnet bar position adjustments via remote control.
Swing Duo™ software helps determine motion profiles.
For more information, see the application paper.