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Advanced Magnetics

SCI Advanced Magnetics are available in five basic models:

  • For 125-mm inside diameter targets, the three-row TRM-Bar™ and the four-row mQRM-Bar™ and QRM-Bar™, which have a patented turnaround to increase target utilization
     
  • For 80-mm inside diameter targets, the three-row TRM80-Bar™ and the single-row SRM80-Bar™
Model Gauss (typical) Maximum target outside diameter Sputter angle Patented turnaround (increases utilization) Application

trm125barwlogo

 Model

TRM-Bar™

 Gauss (typical)

540

 Maximum target outside diameter

160 mm

 Sputter angle

+/- 12°

 Patented turnaround (increases utilization)

No

 Application

Standard 125-mm inside-diameter targets, most materials

mqrmbarwlogo

 Model

mQRM-Bar™

 Gauss (typical)

620

 Maximum target outside diameter

170 mm

 Sputter angle

+/- 15°

 Patented turnaround (increases utilization)

Yes

 Application

Thicker 125-mm inside-diameter targets, high material utilization

mqrmbarwlogo

 Model

QRM-Bar™

 Gauss (typical)

870

 Maximum target outside diameter

180 mm

 Sputter Angle

+/- 21°

 Patented turnaround (increases utilization)

Yes

 Application

Thickest 125-mm inside-diameter targets, TCOs and other electrical-grade film

srm80wlogo

 Model

SRM80-Bar™

 Gauss (typical)

565

 Maximum target outside diameter

115 mm

 Sputter angle

+/- 28°

 Patented turnaround (increases utilization)

No

 Application

Standard 80-mm inside-diameter targets; smaller systems: optical, R&D

trm80barwlogo

 Model

TRM80-Bar™

 Gauss (typical)

To be determined

 Maximum target outside diameter

115 mm

 Sputter angle

+/- 19°

 Patented turnaround (increases utilization)

No

 Application

Standard 80-mm inside-diameter targets; smaller systems: optical, R&D